Photoresist Chemicals Carbamic acid, [5-[2-[(4-fluorophenyl)methyl]-2,3-dihydro-1-hydroxy-3-oxo-1H-isoindol- 1-yl]-1H-benzimidazol-2-yl]-, methyl ester, mono(trifluoroacetate) (salt) Cas:870605-53-1 Molecular Formula:C24H19FN4O4.C2HF3O2