Photoresist Chemicals Carbamic acid, [5-[2-[1-(2-fluorophenyl)ethyl]-2,3-dihydro-1-hydroxy-3-oxo-1H-isoindol- 1-yl]-1H-benzimidazol-2-yl]-, methyl ester Cas：870602-03-2 Molecular Formula：C25H21FN4O4