Photoresist Chemicals Carbamic acid, [4-[(3S)-5-[(2-benzoxazolylthio)methyl]-1,1-dioxido-4-oxo-2-(phenylmeth yl)-1,2,5-thiadiazolidin-3-yl]butyl]-, phenylmethyl ester Cas:849415-27-6 Molecular Formula:C29H30N4O6S2