Photoresist Chemicals Carbamic acid, [(3S,6R)-tetrahydro-6-[(1E)-2-(6-methoxy-1,5-naphthyridin-4-yl)ethenyl]- 2H-pyran-3-yl]-, 1,1-dimethylethyl ester Cas:881658-00-0 Molecular Formula:C21H27N3O4