Photoresist Chemicals Carbamic acid, [[(3R,4S)-1-[2-(3-fluoro-6-methoxy-1,5-naphthyridin-4-yl)ethyl]-4-hydroxy -3-pyrrolidinyl]methyl]-, phenylmethyl ester, rel- Cas:872715-67-8 Molecular Formula:C24H27FN4O4