Photoresist Chemicals Carbamic acid, [3-(9-cyclopropyl-6-fluoro-2,3,4,9-tetrahydro-3,4-dioxoisothiazolo[5,4-b] quinolin-7-yl)-2-pyridinyl]-, 1,1-dimethylethyl ester Cas:846566-78-7 Molecular Formula:C23H21FN4O4S