Photoresist Chemicals Carbamic acid, [3-[[(2-amino-6-benzoxazolyl)sulfonyl](2-methylpropyl)amino]-2-hydroxy- 1-(phenylmethyl)propyl]-, (2-chloro-5-thiazolyl)methyl ester Cas:848985-16-0 Molecular Formula:C26H30ClN5O6S2