Photoresist Chemicals Carbamic acid, [3-[[1-[5-[(3-fluorophenyl)methyl]-4,5-dihydro-3-methyl-4-oxoisothiazolo[ 5,4-d]pyrimidin-6-yl]propyl](4-methylbenzoyl)amino]propyl]-, 1,1-dimethylethyl ester Cas:876191-29-6 Molecular Formula:C32H38FN5O4S