Photoresist Chemicals Carbamic acid, [2-(5,7,8,8a-tetrahydro-2,4,8,8,8a-pentamethyl-5,7-dioxo-6H-thieno[2,3 -f]isoindol-6-yl)ethyl]-, 1,1-dimethylethyl ester Cas：599164-85-9 Molecular Formula：C22H30N2O4S