Photoresist Chemicals Carbamic acid, [(1S)-2-[[(1R)-1-[[(2S)-2-amino-1-oxopropyl]amino]-2-phenylethyl]amino ]-1-methyl-2-oxoethyl]-, 9H-fluoren-9-ylmethyl ester Cas:591778-05-1 Molecular Formula:C29H32N4O4