Photoresist Chemicals Carbamic acid, [(1R,2E)-1-[(4S,5S)-5-[[[(1,1-dimethylethyl)dimethylsilyl]oxy]methyl]-2,2- dimethyl-1,3-dioxolan-4-yl]-2-pentenyl]-, 1,1-dimethylethyl ester Cas:851321-32-9 Molecular Formula:C22H43NO5Si