Photoresist Chemicals Butanedioic acid, sulfo-, 4-(2,2,3,3,4,4,5,5,6,6-decafluorohexyl) 1-(2,2,3,3,4,4,5,5-octafluoropentyl) ester, sodium salt Cas：98182-82-2 Molecular Formula：C15H10F18O7S.Na