Photoresist Chemicals Butanediamide, N-(5-methyl-3-isoxazolyl)-N-[2-oxo-2-[[(tetrahydro-2-furanyl)methyl]amino]ethyl]-N-[(tetrahydro-2-furanyl)methyl]- (9CI) Cas：602322-14-5 Molecular Formula：C20H30N4O6