Photoresist Chemicals Butanamide, 4-chloro-N-[3-(1,2,6,7-tetrahydro-1-oxo[1,4]thiazino[4,3-d][1,2,4]triazin- 4-yl)phenyl]- Cas:590405-33-7 Molecular Formula:C16H17ClN4O2S