Photoresist Chemicals Butanamide, 2-amino-N-[4-[5-cyclohexyl-6-fluoro-2,3-dihydro-2-oxo-3-(phenylmethyl)- 1H-1,3,4-benzotriazepin-1-yl]phenyl]-3-methyl-, (2S)- Cas:916507-06-7 Molecular Formula:C32H36FN5O2