Photoresist Chemicals beta-Alanine, N-((2S)-2,4-dihydroxy-3,3-dimethyl-1-oxobutyl)-, calcium salt, compd. with (2,5-dioxo-4-imidazolidinyl)urea (2:1:2) Cas：5899-45-6 Molecular Formula：C26H44CaN10O16