Photoresist Chemicals Benzoic acid, 5-[2-[2-[(2-chloro-4-fluorophenyl)methoxy]-5-(trifluoromethyl)-3-pyridinyl]- 1-cyclopenten-1-yl]-2-fluoro-, ethyl ester Cas：850868-46-1 Molecular Formula：C27H21ClF5NO3