Photoresist Chemicals Benzoic acid, 4-[[6-[[[3-fluoro-4-(4-morpholinyl)phenyl](2-thienylcarbonyl)amino]methyl] -3-azabicyclo[3.1.0]hex-3-yl]sulfonyl]- Cas:850810-28-5 Molecular Formula:C28H28FN3O6S2