Photoresist Chemicals Benzoic acid, 4-[[(2R,5S)-5-[[(2S)-2-cyano-1-pyrrolidinyl]carbonyl]-2-pyrrolidinyl]meth oxy]-3-(1-methylethyl)-, mono(trifluoroacetate) Cas:896733-84-9 Molecular Formula:C21H27N3O4.C2HF3O2