Photoresist Chemicals Benzoic acid, 3,4-dichloro-, 1-[(2-chloro-5-thiazolyl)methyl]-1,2,3,5,6,7-hexahydro-8-nitroimidazo[1,2 -a]pyridin-5-yl ester Cas:874751-21-0 Molecular Formula:C18H15Cl3N4O4S