Photoresist Chemicals Benzoic acid, 3-[7-chloro-6-methyl-2-oxo-3-[2-oxo-2-[[2-(trifluoromethyl)phenyl]amino] ethyl]-2H-1-benzopyran-4-yl]-, ethyl ester Cas:566944-73-8 Molecular Formula:C28H21ClF3NO5