Photoresist Chemicals Benzoic acid, 3-[6-bromo-8-[[(1,1-dimethylethyl)dimethylsilyl]oxy]-3,4-dihydro-3-oxo-2- quinoxalinyl]-2-fluoro-, methyl ester Cas：688808-13-1 Molecular Formula：C22H24BrFN2O4Si