Photoresist Chemicals Benzo[b]thiophene, 3,3′-(3,3,4,4,5,5-hexafluoro-1-cyclopentene-1,2-diyl)bis[6-(1,1-dimethyl ethyl)-2-methyl-, 1,1,1′,1′-tetraoxide Cas：848785-36-4 Molecular Formula：C31H30F6O4S2