Photoresist Chemicals Benzo[b]thiophene-2-carboxamide, 3-chloro-6-methyl-N-[[4-(1-methylethyl)phenyl]methyl]-N-(tetrahydro-1,1-dioxido-3-thienyl)- (9CI) Cas：587003-20-1 Molecular Formula：C24H26ClNO3S2-2