Photoresist Chemicals Benzenesulfonamide, 6-chloro-2-[[(1,1-dimethylethyl)dimethylsilyl]oxy]-N,N-dimethyl-3-[[[2-(1- methylethyl)phenyl]carbonimidoyl]amino]- Cas:914638-86-1 Molecular Formula:C24H34ClN3O3SSi