Photoresist Chemicals Benzenecarbothioic acid, 4-[(methoxycarbonyl)oxy]-, S-(3,3,4,4,5,5,6,6,7,7,8,8,9,9,10,10,10-heptadecafluorodecyl) ester Cas：877455-68-0 Molecular Formula：C19H11F17O4S