Photoresist Chemicals Benzeneacetamide, N-[6-(3-chloro-2-thienyl)-5-[2-[(4-fluorobenzoyl)amino]ethyl]-4,5-dihydro- 4-thioxo-1H-pyrrolo[3,2-d]pyrimidin-7-yl]- Cas:846570-29-4 Molecular Formula:C27H21ClFN5O2S2