Photoresist Chemicals Benzeneacetamide, N-[[[3-fluoro-4-[[2-[2-(4-morpholinyl)-5-thiazolyl]thieno[3,2-b]pyridin-7-yl] oxy]phenyl]amino]thioxomethyl]- Cas:875336-72-4 Molecular Formula:C29H24FN5O3S3