Photoresist Chemicals Benzamide, N-[[trans-3-[3-chloro-4-(1-pyrrolidinylmethyl)phenoxy]cyclobutyl]methyl]- 3,4-difluoro-N-methyl-, 2,2,2-trifluoroacetate (1:1) Cas:917819-75-1 Molecular Formula:C24H27ClF2N2O2.C2HF3O2