Photoresist Chemicals Benzamide, N-[6-[[2-[[(1,1-dimethylethyl)dimethylsilyl]oxy]ethyl]amino]-3-pyridinyl]-2- methyl-5-[[3-(trifluoromethyl)benzoyl]amino]- Cas：896160-36-4 Molecular Formula：C29H35F3N4O3Si