Photoresist Chemicals Benzamide, 4-azido-N-methyl-N-[2-[[2-[methyl[(2,5,9-trimethyl-7-oxo-7H-furo[3,2-g][ 1]benzopyran-3-yl)methyl]amino]ethyl]dithio]ethyl]- Cas:98474-57-8 Molecular Formula:C28H31N5O4S2