Photoresist Chemicals Benzamide, 4-[[7-[(2,5-difluorophenyl)methyl]-7H-pyrrolo[2,3-d]pyrimidin-2-yl]amino]- N-[1-(2-propenyl)-4-piperidinyl]- Cas:909560-36-7 Molecular Formula:C28H28F2N6O