Photoresist Chemicals Benzamide, 3-[[4-[[(1R)-1-(3,5-difluorophenyl)propyl]amino]-1-oxido-1,2,5-thiadiazol -3-yl]amino]-2-hydroxy-N,N-dimethyl- Cas：681513-61-1 Molecular Formula：C20H21F2N5O3S