Photoresist Chemicals Benzamide, 2-hydroxy-N,N-dimethyl-3-[[4-[[(1R)-1-(5-methyl-2-furanyl)propyl]amino]- 1-oxido-1,2,5-thiadiazol-3-yl]amino]-6-(trifluoromethyl)- Cas:681513-53-1 Molecular Formula:C20H22F3N5O4S