Photoresist Chemicals Acridinium,9-[[4-[5-(4-chlorophenyl)-4-(ethoxycarbonyl)-4,5-dihydro-1,3,4-oxadiazol-2-yl]phenyl]amino]-10-methyl-, methanesulfonate Cas:880168-74-1 Molecular Formula:C31H26ClN4O3.CH3O3S