Photoresist Chemicals Aceticacid,2-[[[1-(4-ethyl-3,4-dihydro-3-oxo-2H-1,4-benzoxazin-6-yl)ethylidene]amino]oxy]-,2-(diethylamino)ethyl ester Cas:91119-65-2 Molecular Formula:C20H29 N3 O5