Photoresist Chemicals Acetic acid, [2-chloro-4-[2-[(5-ethyl-2-pyrimidinyl)[[4-(trifluoromethoxy)phenyl]methyl] amino]-1,1-dimethylethyl]phenoxy]-, 1,1-dimethylethyl ester Cas:596115-31-0 Molecular Formula:C30H35ClF3N3O4