Photoresist Chemicals Acetic acid, [1-[4-[(5S)-5-[(acetylamino)methyl]-2-oxo-3-oxazolidinyl]-2-fluorophenyl]- 4-piperidinylidene]-, ethyl ester, monohydrochloride Cas:685571-05-5 Molecular Formula:C21H26FN3O5.ClH