Photoresist Chemicals Acetamide, N-[4-[3-[2-(1-azetidinyl)ethoxy]-3-methyl-1-butynyl]-2-chlorophenyl]-2-[[1- (2-chloro-4-cyclopropylphenyl)-1H-tetrazol-5-yl]thio]- Cas:871473-77-7 Molecular Formula:C28H30Cl2N6O2S