Photoresist Chemicals Acetamide, N-[4-[[[1-(cyclobutylmethyl)-2-(1,1-dimethylethyl)-1H-benzimidazol-5-yl] methylamino]sulfonyl]phenyl]-, mono(trifluoroacetate) Cas:849350-07-8 Molecular Formula:C25H32N4O3S.C2HF3O2