Photoresist Chemicals Acetamide, 2,2-dichloro-N-[[(5S)-3-[4-(3,4-dihydro-1,1-dioxido-2H-thiopyran-4-yl)-3 -fluorophenyl]-2-oxo-5-oxazolidinyl]methyl]- Cas：570390-75-9 Molecular Formula：C17H17Cl2FN2O5S