Photoresist Chemicals Acetamide, 2-[4-chloro-2-[3-fluoro-5-(trifluoromethyl)benzoyl]phenoxy]-N-[3-fluoro-2- methyl-4-[(tetrahydro-2-methyl-5-oxo-2-furanyl)ethynyl]phenyl]- Cas:880652-40-4 Molecular Formula:C30H21ClF5NO5