Photoresist Chemicals Acetamide, 2-[3-[[4-[(3,4-dihydro-1,1-dioxido-3-oxo-2H-1,4-benzothiazin-6-yl)amino ]-5-fluoro-2-pyrimidinyl]amino]phenoxy]-N-methyl- Cas：841289-65-4 Molecular Formula：C21H19FN6O5S