Photoresist Chemicals Bicyclo[3.1.0]hexane-2,6-dicarboxylic acid, 2-amino-3-[(3,4-dichlorophenyl)methoxy]-6-fluoro-, 6-pentyl ester, (1R,2R,3R,5R,6R)- Cas:820243-86-5 Molecular Formula:C20H24Cl2FNO5