Photoresist Chemicals 2-Pyrrolidinecarboxamide, N-[1-[7-[(4-chloro-2-fluorophenyl)amino]-1-ethyl-3-methyl-1H-pyrazolo[4, 3-d]pyrimidin-5-yl]-4-piperidinyl]-N-ethyl-1-methyl-, (2S)- Cas:928766-88-5 Molecular Formula:C27H36ClFN8O