Photoresist Chemicals 2,8,9-Trioxa-5-azonia-1-borabicyclo[3.3.3]undecane,3,3-diphenyl-5-(trimethylsilyl)-, 1,1,1-trifluoromethanesulfonate (1:1) Cas:928853-59-2 Molecular Formula:C21H29BNO3Si.CF3O3S