Photoresist Chemicals 2-Thiophenecarboxamide, N-[1-(3-isoxazolyl)ethyl]-N-methyl-5-(2,2,2-trifluoroacetyl)-, 2,2,2-trifluoroacetate (1:1) Cas：929027-61-2 Molecular Formula：C13H11F3N2O3S.C2HF3O2