Photoresist Chemicals 1H-Pyrrolo[2,3-c]pyridine-1-carboxylic acid, 7-chloro-3-methyl-4-[[[(tetrahydro-2H-pyran-4-yl)methyl]amino]carbonyl]- , 1,1-dimethylethyl ester Cas:871819-25-9 Molecular Formula:C20H26ClN3O4