Photoresist Chemicals 4-Isothiazolecarboxylic acid, 3-[(2,6-difluoro-4-methylphenyl)methoxy]-5-[[[[3-hydroxy-5-(1-pyrrolidinyl )pentyl]amino]carbonyl]amino]-, methyl ester Cas:878477-58-8 Molecular Formula:C23H30F2N4O5S