Photoresist Chemicals Silacyclobut-2-ene, 4-(1,1-dimethylethyl)-3-[(1R,2S,3R)-2-methoxy-3-phenylcyclopropyl]-1,1 -bis(trimethylsilyl)-4-[(trimethylsilyl)oxy]-, rel- Cas:881178-14-9 Molecular Formula:C26H48O2Si4